METHOD AND APPARATUS FOR MICRO-CONTACT PRINTING

The present invention provides an apparatus for producing patterns on a surface of a substrate. The apparatus includes a rigid support member such as a rigid tubular structure having first and second opposed ends and a fluid flow passageway extending therethrough. A printing stamp is attached at one...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TAM, PUI, GOH, JANE B, LIEDERMAN, ADAM BRIAN, GOH, M. CYNTHIA, GANSKE, ROCKY, CRACAUER, RAYMOND FRANCIS, LOO, RICHARD
Format:	Patent
Sprache:	eng ; spa
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY LINING MACHINES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTING PRINTING MACHINES OR PRESSES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES STAMPING OR NUMBERING APPARATUS OR DEVICES STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	The present invention provides an apparatus for producing patterns on a surface of a substrate. The apparatus includes a rigid support member such as a rigid tubular structure having first and second opposed ends and a fluid flow passageway extending therethrough. A printing stamp is attached at one of the opposed ends of the rigid support member. The printing stamp has a flexible diaphragm portion which has an outer surface which is coated with one or more materials in a pre-selected pattern. A pneumatic pressurizing mechanism communicating with an inner surface of the flexible diaphragm portion through the fluid flow passageway is used to bias the flexible diaphragm portion outwardly into intimate and substantially uniform contact with the surface of the substrate for transferring the pre-selected pattern onto said surface. The rigid tubular supports are attached to a robotic positioning mechanism for providing control of positioning of the stamp relative to the substrate surface. La presente invencion provee un aparato y metodo para producir patrones sobre una superficie de un sustrato; el aparato incluye un miembro de soporte rigido tal como una estructura tubular rigida que tiene primer y segundo extremos opuestos y un pasaje de flujo de fluido que se extiende a traves de los mismos; una matriz de impresion esta fijada en uno de los extremos opuestos del miembro de soporte rigido, la matriz de impresion tiene una porcion de diagrama flexible que tiene una superficie exterior que es revestida con uno o mas materiales en un patron preseleccionado; un mecanismo de presurizacion neumatico que comunica con una superficie interna de la porcion de diagrama flexible a traves del pasaje de flujo de fluido se usa para desviar la porcion de diagrama flexible hacia afuera hacia contacto intimo y sustancialmente uniforme con la superficie del sustrato para transferir el patron preseleccionado sobre dicha superficie; los soportes tubulares rigidos se fijan a un mecanismo de posicion robotico para proveer control de posicion de la matriz en relacion con la superficie del sustrato.