IN-SITU PLASMA/LASER HYBRID SCHEME

A method and apparatus for forming layers on a target. The apparatus and method employ a direct current plasma apparatus to form at least one layer using a plasma jet containing precursors. In some embodiments, the direct current plasma apparatus utilizes axial injection of the precursors through th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NICHOLAS ANTON MOROZ, PRAVANSU S. MOHANTY
Format:	Patent
Sprache:	eng ; spa
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES IRRADIATION DEVICES NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR X-RAY TECHNIQUE
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