FLUIDIZED BED REACTOR FOR PRODUCTION OF HIGH PURITY SILICON

Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases. Se descr...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PEDRO-TOMAS LUJAN GARCIA, JAVIER SAN SEGUNDO SANCHEZ, MANUEL VICENTE VALES CANLE, JOSE LUIS MONTESINOS BARONA, MARIA TOMAS MARTINEZ, EVARISTO AYUSO CONEJERO, XAVIER BENAVIDES REL
Format: Patent
Sprache:eng ; spa
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!