Method for Producing a Foil-Based Pressure Sensor

The invention relates to a method for producing a foil-based pressure sensor (1). In order to facilitate accurate setting of the turn-on point of a sensor cell in a foil-based pressure sensor, the invention provides that the method comprises: - providing a bottom element (2) with a bottom foil (3) a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BENNES Raphael, SCHMITZ Klaus-Peter, MASSING Matthias, SCHON Harald, SCHULER Steffen, GÖDERT Günter
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a method for producing a foil-based pressure sensor (1). In order to facilitate accurate setting of the turn-on point of a sensor cell in a foil-based pressure sensor, the invention provides that the method comprises: - providing a bottom element (2) with a bottom foil (3) and at least one bottom electrode (4, 6, 8) disposed on the bottom foil (3), providing a plurality of top elements (20), each top element (20) comprising a top foil (21) with at least one top electrode (22) disposed under the top foil (21), a combined area of the top elements (20) being smaller than an area of the bottom element (2), individually positioning and at least indirectly connecting the top elements (20) to the bottom element (2) so that at least one top electrode (22) of each top element (20) is disposed over at least one bottom electrode (4, 6, 8) of the bottom element (2) to form a sensor cell (30) that is adapted to be activated when a pressure (pext) on the sensor cell (30) exceeds a turn-on point.