ELD ELEMENT AND ITS MANUFACTURING METHOD
A method of fabricating an electric field electron emitting device includes the first step of forming at least one cathode electrode and an insulating layer on a bottom glass substrate in the direction of row and forming at least one gate electrode thereon in the direction of column, and etching a p...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | A method of fabricating an electric field electron emitting device includes the first step of forming at least one cathode electrode and an insulating layer on a bottom glass substrate in the direction of row and forming at least one gate electrode thereon in the direction of column, and etching a predetermined portion of the gate electrode and insulating layer to form at least one hole or cavity, the second step of rotating the sample formed through the first step to allow it to have a slope angle of 75= from its center, and simultaneously, depositing a metal to form a division layer, the third step of forming a pyramid-shape resistor layer whose front is flat on the cathode electrode through the cavity or hole whose diameter was reduced by the second step using the slope deposition identical to the second step, the fourth step of forming a cone-shape electric field emitting cathode tip having extremely narrow diameter using the same method as the third step, and the fifth step of lifting off the division layer and layers placed thereon simultaneously. |
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