LASER PATTERN GENERATION APPARATUS

In a method of raster scanning a photosensitive material using a modulated laser beam, the beam is split into a plurality of independent beams which are independently modulated. As shown, a beam from a laser 10 is passed to a workpiece 34 via a splitter 13, acousto-optic modulator 16, dove prism 17...

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Bibliographische Detailangaben
Hauptverfasser:	ALLEN, PAUL C, WARKENTIN, PAUL A
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACHINE TOOLS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	In a method of raster scanning a photosensitive material using a modulated laser beam, the beam is split into a plurality of independent beams which are independently modulated. As shown, a beam from a laser 10 is passed to a workpiece 34 via a splitter 13, acousto-optic modulator 16, dove prism 17 (to prevent interference), rotating polygon mirror 24, F-thete lens 26 and beam splitter 28 (to provide beams for (a) system control and (b) workpiece location).