PURIFYING PROCESS OF EXHAUST GAS

PURPOSE:To remove arsine or phosphine by the wet process at relatively low temp. and effectively by allowing gas contg. arsine or phosphine to contact with heavy metal oxide. CONSTITUTION:Oxide of heavy metal such as Mn, Fe, Co, Ni, Cu, Zn, Mo, etc. is formed to pellets, and the pellets are packed in an adsorption cylinder. Gas contg. arsine and/or phosphine as poisonous component is passed through the adsorption cylinder to allow the gas to contact with the heavy metal oxide and remove the arsine and/or phosphine. Ordinary temp. or room temp. is sufficient for the contact, but elevated temp. may be adopted also. The contact may be performed under normal pressure or reduced pressure.