METHOD OF MANUFACTURING A THIN-FILM MAGNETIC HEAD WITH A NICKEL-IRON PATTERN HAVING INCLINED EDGES

The method of manufacturing a thin-film magnetic head includes forming a layer of a nickel-iron alloy on a substrate, forming a photoresist pattern over the nickel-iron alloy layer, and chemically etching the nickel-iron layer so as to form a pattern having sloping sides. A top thickness of the nick...

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Bibliographische Detailangaben
Hauptverfasser: LAMBERTUS POSTMA, KOEL GERRIT J
Format: Patent
Sprache:eng
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Zusammenfassung:The method of manufacturing a thin-film magnetic head includes forming a layer of a nickel-iron alloy on a substrate, forming a photoresist pattern over the nickel-iron alloy layer, and chemically etching the nickel-iron layer so as to form a pattern having sloping sides. A top thickness of the nickel-iron layer remote from the substrate has a higher iron content than the iron content of the remainder of the nickel-iron alloy layer. The nickel-iron layer is deposited on the substrate in an electroplating bath.