하이브리드 본딩 절연막 형성 재료, 반도체 장치의 제조 방법, 및 반도체 장치

(A) 중합성의 불포화 결합 부위를 갖는 폴리이미드 전구체와, (B) 용제와, (C) 옥심계 광중합 개시제를 포함하는 하이브리드 본딩 절연막 형성 재료. This hybrid bonding insulation film-forming material comprises: (A) a polyimide precursor having a polymerizable unsaturated bond site; (B) a solvent; and (C) an oxime-based photopolymerization initiator....

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Hauptverfasser: KOBAYASHI KAORI, YONEDA SATOSHI, MATSUKAWA DAISAKU, ADACHI KENYA
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creator KOBAYASHI KAORI
YONEDA SATOSHI
MATSUKAWA DAISAKU
ADACHI KENYA
description (A) 중합성의 불포화 결합 부위를 갖는 폴리이미드 전구체와, (B) 용제와, (C) 옥심계 광중합 개시제를 포함하는 하이브리드 본딩 절연막 형성 재료. This hybrid bonding insulation film-forming material comprises: (A) a polyimide precursor having a polymerizable unsaturated bond site; (B) a solvent; and (C) an oxime-based photopolymerization initiator.
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subjects ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE
ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOSITIONS BASED THEREON
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL
ORGANIC MACROMOLECULAR COMPOUNDS
PAINTS
POLISHES
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
USE OF MATERIALS AS ADHESIVES
title 하이브리드 본딩 절연막 형성 재료, 반도체 장치의 제조 방법, 및 반도체 장치
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