FMM REPAIR SYSTEM AND METHOD FOR FINE-METAL-MASK

본 발명에 의한 FMM 리페어 시스템은 관통홀 및 상기 관통홀보다 크기가 큰 공대 관통홀이 형성된 불량 FMM시트, 상기 불량 FMM시트와 동종재질로 형성되고, 상기 공대 관통홀을 커버하도록 상기 불량 FMM시트의 상부에 적층되는 리페어 시트, 상기 리페어 시트의 적어도 일부가 상기 공대 관통홀을 채워 리페어층을 형성하도록 제1레이저빔을 조사하는 제1레이저 및 상기 리페어층에 상기 관통홀과 동일한 크기의 리페어홀을 형성하도록 제2레이저빔을 조사하는 제2레이저를 포함한다....

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Hauptverfasser: NAM GI JUNG, RYU JUN KYU, LEE JIN KWAN, LEE SUN WOO
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Sprache:eng ; kor
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creator NAM GI JUNG
RYU JUN KYU
LEE JIN KWAN
LEE SUN WOO
description 본 발명에 의한 FMM 리페어 시스템은 관통홀 및 상기 관통홀보다 크기가 큰 공대 관통홀이 형성된 불량 FMM시트, 상기 불량 FMM시트와 동종재질로 형성되고, 상기 공대 관통홀을 커버하도록 상기 불량 FMM시트의 상부에 적층되는 리페어 시트, 상기 리페어 시트의 적어도 일부가 상기 공대 관통홀을 채워 리페어층을 형성하도록 제1레이저빔을 조사하는 제1레이저 및 상기 리페어층에 상기 관통홀과 동일한 크기의 리페어홀을 형성하도록 제2레이저빔을 조사하는 제2레이저를 포함한다.
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subjects APPARATUS THEREFOR
CHEMICAL SURFACE TREATMENT
CHEMISTRY
CLADDING OR PLATING BY SOLDERING OR WELDING
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
METALLURGY
PERFORMING OPERATIONS
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
SOLDERING OR UNSOLDERING
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TRANSPORTING
WELDING
WORKING BY LASER BEAM
title FMM REPAIR SYSTEM AND METHOD FOR FINE-METAL-MASK
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