SUBSTRATE TREATING APPARATUS AND METHOD OF TREATING SUBSTRATE USING THE SAME

기판 처리 장치는 챔버, 챔버 내부에서 제1 방향으로 이동 가능한 기판 캐리어, 및 챔버 내부에 배치되고, 기판 캐리어가 통과하는 개구가 정의되며, 개구에 배치되고 회전 가능한 마그넷 필터를 포함하는 필터부를 포함한다. A substrate treating apparatus includes a chamber defining a chamber cavity, a substrate carrier movable in a first direction inside of the chamber cavity, and a filter disposed...

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Bibliographische Detailangaben
Hauptverfasser:	SEO CHANG WOOK, PARK YOUNG HUN, KANG EU GENE, YUN SEUNG GEUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	기판 처리 장치는 챔버, 챔버 내부에서 제1 방향으로 이동 가능한 기판 캐리어, 및 챔버 내부에 배치되고, 기판 캐리어가 통과하는 개구가 정의되며, 개구에 배치되고 회전 가능한 마그넷 필터를 포함하는 필터부를 포함한다. A substrate treating apparatus includes a chamber defining a chamber cavity, a substrate carrier movable in a first direction inside of the chamber cavity, and a filter disposed inside the chamber cavity, defining an opening through which the substrate carrier passes, and including a magnet filter disposed in the opening and being rotatable.