Substrate processing apparatus

본 발명은 기판처리장치에 대한 것으로서, 보다 상세하게는 기판에 대한 처리공정을 진행하는 챔버 내부에 기판지지부에서 방출되는 열을 복사 및/또는 반사하는 반사하여 기판에 대한 처리공정을 보다 효율적으로 진행할 수 있는 기판처리장치에 대한 것이다. The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of performing a processing p...

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Bibliographische Detailangaben
Hauptverfasser:	WON JONG-PIL, JANG KYUNG-HO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	본 발명은 기판처리장치에 대한 것으로서, 보다 상세하게는 기판에 대한 처리공정을 진행하는 챔버 내부에 기판지지부에서 방출되는 열을 복사 및/또는 반사하는 반사하여 기판에 대한 처리공정을 보다 효율적으로 진행할 수 있는 기판처리장치에 대한 것이다. The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of performing a processing process on a substrate more efficiently by radiating and/or reflecting heat emitted from a substrate support portion toward the substrate support portion when the processing process on the substrate is performed. The substrate processing apparatus includes: a chamber providing a processing space for a substrate; a substrate supporting part which is provided inside the chamber, supports the substrate, and heats the substrate; and a reflection unit that is disposed below the substrate support unit and radiates or reflects heat emitted from the substrate support unit toward the substrate support unit.