apparatus and method for inspecting defect of substrate

본 기판 결함검사장치는 유체공급부와, 유체공급부로부터 유체를 공급받는 침지부로서, 기판의 검사대상부분이 침지되는 침지부를 포함하고, 침지부는, 윈도우패널을 갖는 제 1 플레이트와, 제 1 플레이트와 나란하게 배치되는 제 2 플레이트로서, 제 1 플레이트와 사이에 공급된 유체가 채워진 유체층이 배치되는 제 2 플레이트를 포함하고, 침지부는, 제 1, 2 플레이트 사이에서 유체층에 침지되는 검사대상부분이 윈도우패널을 통해 외부로 검사가능하게 구성된다....

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Hauptverfasser:	PARK KEUNHWAN, LEE GITAEK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRICITY FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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creator	PARK KEUNHWAN LEE GITAEK
description	본 기판 결함검사장치는 유체공급부와, 유체공급부로부터 유체를 공급받는 침지부로서, 기판의 검사대상부분이 침지되는 침지부를 포함하고, 침지부는, 윈도우패널을 갖는 제 1 플레이트와, 제 1 플레이트와 나란하게 배치되는 제 2 플레이트로서, 제 1 플레이트와 사이에 공급된 유체가 채워진 유체층이 배치되는 제 2 플레이트를 포함하고, 침지부는, 제 1, 2 플레이트 사이에서 유체층에 침지되는 검사대상부분이 윈도우패널을 통해 외부로 검사가능하게 구성된다.
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LEE GITAEK</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20240035031A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2024</creationdate><topic>DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING</topic><topic>ELECTRICITY</topic><topic>FREQUENCY-CHANGING</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>NON-LINEAR OPTICS</topic><topic>OPTICAL ANALOGUE/DIGITAL CONVERTERS</topic><topic>OPTICAL LOGIC ELEMENTS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>PARK KEUNHWAN</creatorcontrib><creatorcontrib>LEE GITAEK</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>PARK KEUNHWAN</au><au>LEE GITAEK</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>apparatus and method for inspecting defect of substrate</title><date>2024-03-15</date><risdate>2024</risdate><abstract>본 기판 결함검사장치는 유체공급부와, 유체공급부로부터 유체를 공급받는 침지부로서, 기판의 검사대상부분이 침지되는 침지부를 포함하고, 침지부는, 윈도우패널을 갖는 제 1 플레이트와, 제 1 플레이트와 나란하게 배치되는 제 2 플레이트로서, 제 1 플레이트와 사이에 공급된 유체가 채워진 유체층이 배치되는 제 2 플레이트를 포함하고, 침지부는, 제 1, 2 플레이트 사이에서 유체층에 침지되는 검사대상부분이 윈도우패널을 통해 외부로 검사가능하게 구성된다.</abstract><oa>free_for_read</oa></addata></record>
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subjects	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRICITY FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
title	apparatus and method for inspecting defect of substrate
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