웨이퍼-형상 물품을 홀딩하기 위한 디바이스

웨이퍼-형상 물품을 홀딩하기 위한 디바이스에 있어서, 디바이스 바디를 갖는 디바이스는, 디바이스에 의해 지지된 웨이퍼-형상 물품과 대면하도록 구성된 표면으로서, 표면은 중앙 리세스된 부분을 갖는, 표면; 중앙 리세스된 부분 외부의 표면에 유출구들을 갖는 제 1 가스 노즐들; 및 중앙 리세스된 부분 내부의 표면에 유출구들을 갖는 제 2 가스 노즐들을 포함한다. A device for holding a wafer-shaped article, the device having a device body comprising: a surface...

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Hauptverfasser:	SEMMELROCK CHRISTOPH, BRUGGER MICHAEL, PUGGL MICHAEL
Format:	Patent
Sprache:	kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	SEMMELROCK CHRISTOPH BRUGGER MICHAEL PUGGL MICHAEL
description	웨이퍼-형상 물품을 홀딩하기 위한 디바이스에 있어서, 디바이스 바디를 갖는 디바이스는, 디바이스에 의해 지지된 웨이퍼-형상 물품과 대면하도록 구성된 표면으로서, 표면은 중앙 리세스된 부분을 갖는, 표면; 중앙 리세스된 부분 외부의 표면에 유출구들을 갖는 제 1 가스 노즐들; 및 중앙 리세스된 부분 내부의 표면에 유출구들을 갖는 제 2 가스 노즐들을 포함한다. A device for holding a wafer-shaped article, the device having a device body comprising: a surface configured to face a wafer-shaped article supported by the device, the surface having a central recessed portion; first gas nozzles having outlets in the surface outside the central recessed portion; and second gas nozzles having outlets in the surface inside the central recessed portion.
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A device for holding a wafer-shaped article, the device having a device body comprising: a surface configured to face a wafer-shaped article supported by the device, the surface having a central recessed portion; first gas nozzles having outlets in the surface outside the central recessed portion; and second gas nozzles having outlets in the surface inside the central recessed portion.</description><language>kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240227&DB=EPODOC&CC=KR&NR=20240025640A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240227&DB=EPODOC&CC=KR&NR=20240025640A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SEMMELROCK CHRISTOPH</creatorcontrib><creatorcontrib>BRUGGER MICHAEL</creatorcontrib><creatorcontrib>PUGGL MICHAEL</creatorcontrib><title>웨이퍼-형상 물품을 홀딩하기 위한 디바이스</title><description>웨이퍼-형상 물품을 홀딩하기 위한 디바이스에 있어서, 디바이스 바디를 갖는 디바이스는, 디바이스에 의해 지지된 웨이퍼-형상 물품과 대면하도록 구성된 표면으로서, 표면은 중앙 리세스된 부분을 갖는, 표면; 중앙 리세스된 부분 외부의 표면에 유출구들을 갖는 제 1 가스 노즐들; 및 중앙 리세스된 부분 내부의 표면에 유출구들을 갖는 제 2 가스 노즐들을 포함한다. A device for holding a wafer-shaped article, the device having a device body comprising: a surface configured to face a wafer-shaped article supported by the device, the surface having a central recessed portion; first gas nozzles having outlets in the surface outside the central recessed portion; and second gas nozzles having outlets in the surface inside the central recessed portion.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLB-M3vFm7lb3vbu0X07Y-qb5kaF12v2vJ3U8WZui8LbmQ2vp6x8O3XGqx0bFN7MaXk7dY7C6ylTXm-YAtTxpmsJDwNrWmJOcSovlOZmUHZzDXH20E0tyI9PLS5ITE7NSy2J9w4yMjAyMTAwMjUzMXA0Jk4VAHOdQQ0</recordid><startdate>20240227</startdate><enddate>20240227</enddate><creator>SEMMELROCK CHRISTOPH</creator><creator>BRUGGER MICHAEL</creator><creator>PUGGL MICHAEL</creator><scope>EVB</scope></search><sort><creationdate>20240227</creationdate><title>웨이퍼-형상 물품을 홀딩하기 위한 디바이스</title><author>SEMMELROCK CHRISTOPH ; BRUGGER MICHAEL ; PUGGL MICHAEL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20240025640A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>kor</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>SEMMELROCK CHRISTOPH</creatorcontrib><creatorcontrib>BRUGGER MICHAEL</creatorcontrib><creatorcontrib>PUGGL MICHAEL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SEMMELROCK CHRISTOPH</au><au>BRUGGER MICHAEL</au><au>PUGGL MICHAEL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>웨이퍼-형상 물품을 홀딩하기 위한 디바이스</title><date>2024-02-27</date><risdate>2024</risdate><abstract>웨이퍼-형상 물품을 홀딩하기 위한 디바이스에 있어서, 디바이스 바디를 갖는 디바이스는, 디바이스에 의해 지지된 웨이퍼-형상 물품과 대면하도록 구성된 표면으로서, 표면은 중앙 리세스된 부분을 갖는, 표면; 중앙 리세스된 부분 외부의 표면에 유출구들을 갖는 제 1 가스 노즐들; 및 중앙 리세스된 부분 내부의 표면에 유출구들을 갖는 제 2 가스 노즐들을 포함한다. A device for holding a wafer-shaped article, the device having a device body comprising: a surface configured to face a wafer-shaped article supported by the device, the surface having a central recessed portion; first gas nozzles having outlets in the surface outside the central recessed portion; and second gas nozzles having outlets in the surface inside the central recessed portion.</abstract><oa>free_for_read</oa></addata></record>
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
title	웨이퍼-형상 물품을 홀딩하기 위한 디바이스
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