In-line transfer system
The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transf...
Gespeichert in:
Hauptverfasser: | , , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transfer means which enables the shuttle to be transferred along the transfer rails. The shuttle comprises: right and left supporters which are disposed in parallel to be spaced apart from each other and correspond to the right and left transfer rails to be transferable thereon; and a bridge which connects both supporters. Both front ends of the mask are seated on the right and left supporters, respectively. The bridge is configured to connect the right and left supporters across the mask, the substrate, and an upper side of the magnet plate. In addition, the in-line transfer system includes an anti-adhesive means that prevents evaporated material discharged from an evaporation source from adhering to the transfer means, the supporters of the shuttle, an electromagnet rail, and the transfer rails. The anti-adhesive means comprises: a left anti-adhesive baffle which covers the bottom surface and the inner surface of the left transfer rail and the inner surface of the left supporter of the shuttle; and a right anti-adhesive baffle which covers the bottom surface and inner surface of the electromagnet rail, a bottom surface of the right transfer rail, and an inner surface of the right supporter of the shuttle. According to the in-line transfer system of the present invention, a separate cleaning process is not required since the contamination of the shuttle and transfer rails caused by the evaporation material is proactively prevented. Therefore, a facility for the cleaning process is also not required, thereby enhancing the manufacturing efficiency of an OLED display device since time for the cleaning process is eliminated.
본 발명에 따른 인라인 이송시스템은, 좌측 및 우측 이송레일과, 상기 이송레일을 따라 이송되며 마스크와 기판 및 자석판이 탑재되는 셔틀과, 상기 셔틀이 이송레일을 따라 이송되도록 하는 이송수단을 포함하여 이루어진다. 상기 셔틀은 서로 평행하게 이격 배치되어 좌측 및 우측 이송레일에 이송 가능하게 대응되는 좌측 및 우측 받침대와, 상기 양측 받침대를 연결하는 브릿지를 포함하며, 상기 좌측 및 우측 받침대에는 상기 마스크의 양선단이 각각 안착되며, 상기 브릿지는 상기 마스크와 기판 및 자석판의 상방을 가로질러 상기 좌측 및 우측 받침대를 연결하도록 구성된다. 또한 본 발명은 상기 증발원에서 배출되는 증착물질이 이송수단과 셔틀의 받침대 및 전자석 레일 과 이송레일에 점착되지 않도록 하는 방착수단을 포함하여 이루어진다. 상기 방착수단은 상기 좌측 이송레일의 저면과 내측면 및 셔틀의 좌측 받침대의 내측면을 커버하는 좌측 방착배플과, 상기 전자석 레일의 저면과 내측면과 우측 이송레일의 저면 및 셔틀의 우측 받침대의 내측면을 커버하는 우측 방착배플을 포함하여 이루어진다. 상술한 바와 같은 본 |
---|