Aluminum alloys and articles with high uniformity and elemental content

본원에 개시된 것은 합금 원소로서 스칸듐을 갖는 알루미늄 합금이다. 합금은 원자 백분율로 측정된 높은 스칸듐 함량을 가지며, 본원에 기술된 바와 같이 매우 균일하다. 이들 합금으로부터 제품을 형성하는 방법이 또한 개시되며, 이러한 제품은 다량의 스칸듐을 함유하는 박막을 형성하는데 사용될 수 있는 스퍼터링 타겟을 포함한다. Disclosed herein are aluminum alloys with scandium as the alloying element. The alloys have a high scandium content, as...

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Bibliographische Detailangaben
Hauptverfasser:	DYLAG WIESLAW, GARDINIER KATHARINE S, TESTANERO ARTHUR V, MYASNIKOV VITALIY V, KOMERTZ MATTHEW J, VAN HEERDEN DAVID P
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CASTING CASTING OF METALS CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS POWDER METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	본원에 개시된 것은 합금 원소로서 스칸듐을 갖는 알루미늄 합금이다. 합금은 원자 백분율로 측정된 높은 스칸듐 함량을 가지며, 본원에 기술된 바와 같이 매우 균일하다. 이들 합금으로부터 제품을 형성하는 방법이 또한 개시되며, 이러한 제품은 다량의 스칸듐을 함유하는 박막을 형성하는데 사용될 수 있는 스퍼터링 타겟을 포함한다. Disclosed herein are aluminum alloys with scandium as the alloying element. The alloys have a high scandium content, as measured by atomic percentage, and are highly uniform, as described herein. Methods of forming articles from these alloys are also disclosed, such articles including sputtering targets that can be used to form thin films containing high amounts of scandium.