METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plu...

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Bibliographische Detailangaben

Hauptverfasser:	ASAKURA YASUNOBU, KUSAYANAGI HIROKAZU, HATA TOMOYASU, HASHIMOTO TAKUMI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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