METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plu...

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Bibliographische Detailangaben
Hauptverfasser:	ASAKURA YASUNOBU, KUSAYANAGI HIROKAZU, HATA TOMOYASU, HASHIMOTO TAKUMI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plurality of actuators. The method comprises the steps of: comparing a first signal output from each of the plurality of sensors, in a state where the plurality of actuators and the plurality of sensors are regarded as normal, with a second signal output from each of the plurality of sensors in a state where a control apparatus is used; and diagnosing a device comprising at least one among a failed actuator and a failed sensor as a failure location based on the comparison result in the step of comparing. 대상물에 추력을 가하도록 각각 구성된 복수의 액추에이터, 대상물의 상태량을 검출하도록 각각 구성된 복수의 센서, 및 복수의 액추에이터를 제어하도록 구성된 제어기를 포함하는 제어 장치의 고장 위치를 진단하는 방법으로서, 이 방법은 복수의 액추에이터 및 복수의 센서가 정상이라고 간주되는 상태에서 복수의 센서 각각으로부터 출력되는 제1 신호와, 제어 장치가 사용되는 상태에서 복수의 센서 각각으로부터 출력되는 제2 신호를 비교하는 단계; 및 비교하는 단계에서의 비교 결과에 기초하여 고장난 액추에이터 및 고장난 센서 중 적어도 하나를 포함하는 디바이스를 고장 위치로서 진단하는 단계를 포함한다.