METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plu...
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| creator | ASAKURA YASUNOBU KUSAYANAGI HIROKAZU HATA TOMOYASU HASHIMOTO TAKUMI |
| description | The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plurality of actuators. The method comprises the steps of: comparing a first signal output from each of the plurality of sensors, in a state where the plurality of actuators and the plurality of sensors are regarded as normal, with a second signal output from each of the plurality of sensors in a state where a control apparatus is used; and diagnosing a device comprising at least one among a failed actuator and a failed sensor as a failure location based on the comparison result in the step of comparing.
대상물에 추력을 가하도록 각각 구성된 복수의 액추에이터, 대상물의 상태량을 검출하도록 각각 구성된 복수의 센서, 및 복수의 액추에이터를 제어하도록 구성된 제어기를 포함하는 제어 장치의 고장 위치를 진단하는 방법으로서, 이 방법은 복수의 액추에이터 및 복수의 센서가 정상이라고 간주되는 상태에서 복수의 센서 각각으로부터 출력되는 제1 신호와, 제어 장치가 사용되는 상태에서 복수의 센서 각각으로부터 출력되는 제2 신호를 비교하는 단계; 및 비교하는 단계에서의 비교 결과에 기초하여 고장난 액추에이터 및 고장난 센서 중 적어도 하나를 포함하는 디바이스를 고장 위치로서 진단하는 단계를 포함한다. |
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대상물에 추력을 가하도록 각각 구성된 복수의 액추에이터, 대상물의 상태량을 검출하도록 각각 구성된 복수의 센서, 및 복수의 액추에이터를 제어하도록 구성된 제어기를 포함하는 제어 장치의 고장 위치를 진단하는 방법으로서, 이 방법은 복수의 액추에이터 및 복수의 센서가 정상이라고 간주되는 상태에서 복수의 센서 각각으로부터 출력되는 제1 신호와, 제어 장치가 사용되는 상태에서 복수의 센서 각각으로부터 출력되는 제2 신호를 비교하는 단계; 및 비교하는 단계에서의 비교 결과에 기초하여 고장난 액추에이터 및 고장난 센서 중 적어도 하나를 포함하는 디바이스를 고장 위치로서 진단하는 단계를 포함한다.</description><language>eng ; kor</language><subject>CALCULATING ; COMPUTING ; CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; COUNTING ; ELECTRIC DIGITAL DATA PROCESSING ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231128&DB=EPODOC&CC=KR&NR=20230162538A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20231128&DB=EPODOC&CC=KR&NR=20230162538A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ASAKURA YASUNOBU</creatorcontrib><creatorcontrib>KUSAYANAGI HIROKAZU</creatorcontrib><creatorcontrib>HATA TOMOYASU</creatorcontrib><creatorcontrib>HASHIMOTO TAKUMI</creatorcontrib><title>METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM</title><description>The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plurality of actuators. The method comprises the steps of: comparing a first signal output from each of the plurality of sensors, in a state where the plurality of actuators and the plurality of sensors are regarded as normal, with a second signal output from each of the plurality of sensors in a state where a control apparatus is used; and diagnosing a device comprising at least one among a failed actuator and a failed sensor as a failure location based on the comparison result in the step of comparing.
대상물에 추력을 가하도록 각각 구성된 복수의 액추에이터, 대상물의 상태량을 검출하도록 각각 구성된 복수의 센서, 및 복수의 액추에이터를 제어하도록 구성된 제어기를 포함하는 제어 장치의 고장 위치를 진단하는 방법으로서, 이 방법은 복수의 액추에이터 및 복수의 센서가 정상이라고 간주되는 상태에서 복수의 센서 각각으로부터 출력되는 제1 신호와, 제어 장치가 사용되는 상태에서 복수의 센서 각각으로부터 출력되는 제2 신호를 비교하는 단계; 및 비교하는 단계에서의 비교 결과에 기초하여 고장난 액추에이터 및 고장난 센서 중 적어도 하나를 포함하는 디바이스를 고장 위치로서 진단하는 단계를 포함한다.</description><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>COUNTING</subject><subject>ELECTRIC DIGITAL DATA PROCESSING</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjrEKwkAQRNNYiPoPB9YBTVBs17tLcnjZDZu9wkpEzkpU0I_0szxBQbCxWpidNzPD7NFaacgoqpRxUCP1DmtVgfOBrfKkQRzh660Jhckr6DpgkNB_AHH6S_y1eZcaaoau2X6pwInzVrWAoQItgV_F7zWARiFhLgzYOyHepty2C2I5ZwsG1onskw51SrDGhXacDY770y1O3neUTSsrusnj9bKLt-v-EM_xvttwMSvK2XxZLMoVlP-5nhVqUdU</recordid><startdate>20231128</startdate><enddate>20231128</enddate><creator>ASAKURA YASUNOBU</creator><creator>KUSAYANAGI HIROKAZU</creator><creator>HATA TOMOYASU</creator><creator>HASHIMOTO TAKUMI</creator><scope>EVB</scope></search><sort><creationdate>20231128</creationdate><title>METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM</title><author>ASAKURA YASUNOBU ; KUSAYANAGI HIROKAZU ; HATA TOMOYASU ; HASHIMOTO TAKUMI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20230162538A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2023</creationdate><topic>CALCULATING</topic><topic>COMPUTING</topic><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>COUNTING</topic><topic>ELECTRIC DIGITAL DATA PROCESSING</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><toplevel>online_resources</toplevel><creatorcontrib>ASAKURA YASUNOBU</creatorcontrib><creatorcontrib>KUSAYANAGI HIROKAZU</creatorcontrib><creatorcontrib>HATA TOMOYASU</creatorcontrib><creatorcontrib>HASHIMOTO TAKUMI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ASAKURA YASUNOBU</au><au>KUSAYANAGI HIROKAZU</au><au>HATA TOMOYASU</au><au>HASHIMOTO TAKUMI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM</title><date>2023-11-28</date><risdate>2023</risdate><abstract>The present invention relates to a method of diagnosing a failure location of a control apparatus comprising a plurality of actuators each configured to apply thrust to a target, a plurality of sensors each configured to detect a property of the target, and a controller configured to control the plurality of actuators. The method comprises the steps of: comparing a first signal output from each of the plurality of sensors, in a state where the plurality of actuators and the plurality of sensors are regarded as normal, with a second signal output from each of the plurality of sensors in a state where a control apparatus is used; and diagnosing a device comprising at least one among a failed actuator and a failed sensor as a failure location based on the comparison result in the step of comparing.
대상물에 추력을 가하도록 각각 구성된 복수의 액추에이터, 대상물의 상태량을 검출하도록 각각 구성된 복수의 센서, 및 복수의 액추에이터를 제어하도록 구성된 제어기를 포함하는 제어 장치의 고장 위치를 진단하는 방법으로서, 이 방법은 복수의 액추에이터 및 복수의 센서가 정상이라고 간주되는 상태에서 복수의 센서 각각으로부터 출력되는 제1 신호와, 제어 장치가 사용되는 상태에서 복수의 센서 각각으로부터 출력되는 제2 신호를 비교하는 단계; 및 비교하는 단계에서의 비교 결과에 기초하여 고장난 액추에이터 및 고장난 센서 중 적어도 하나를 포함하는 디바이스를 고장 위치로서 진단하는 단계를 포함한다.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING |
| title | METHOD OF DIAGNOSING FAILURE LOCATION OF CONTROL APPARATUS DIAGNOSTIC APPARATUS CONTROL APPARATUS LITHOGRAPHY APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM |
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