System for diagnosing a prober

A prober diagnosing system is provided. According to one aspect of the present invention, the prober diagnosing system determines a state of a prober that inspects a wafer by moving a chuck to bring the wafer into contact with a probe card. The prober diagnosing system may include: a sound sensor un...

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Bibliographische Detailangaben
Hauptverfasser:	JOO JAE HOON, YOON DAE SEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING MEASURING ELECTRIC VARIABLES MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MEASURING MAGNETIC VARIABLES MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A prober diagnosing system is provided. According to one aspect of the present invention, the prober diagnosing system determines a state of a prober that inspects a wafer by moving a chuck to bring the wafer into contact with a probe card. The prober diagnosing system may include: a sound sensor unit that senses sound generated from the prober over time during an inspection process of the wafer to generate sound data; a data storage unit in which the sound data is stored; and an information processing unit that determines whether the prober abnormally operates through the sound data. 프로버 진단 시스템이 제공된다. 본 발명의 일 측면에 따른 프로버 진단 시스템은 척을 이동시켜 웨이퍼를 프로브카드에 접촉시킴으로써 상기 웨이퍼를 검사하는 프로버의 상태를 판단하는 프로버 진단 시스템에 있어서, 상기 웨이퍼의 검사 과정에서 상기 프로버로부터 시간에 따라 발생하는 소리를 센싱하여 소리 데이터를 생성하는 소리 센서부; 상기 소리 데이터가 저장되는 데이터 저장부; 및 상기 소리 데이터를 통하여 상기 프로버의 비정상 작동 여부를 판단하는 정보처리부; 를 포함할 수 있다.