Apparatus For Cleaning Nozzle For Dispenser And Method For Cleaning The Inside Of Nozzle using thereof

The present invention relates to a nozzle cleaning device for dispensers used in display/semiconductor processes and a method for cleaning the inside of a nozzle using the same, and more specifically, to a nozzle cleaning device for dispensers used in display/semiconductor processes, in which a clea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOI NAM KYU, SHIM HYUN WOK, JUNG SUNG JIN, KIM MOO SONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS CLEANING CLEANING IN GENERAL NOZZLES PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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