PUMP APPARATUS FOR TREATING CHEMICAL AND APPARATUS FOR TREATING SUBSTRATE

Provided are a pump, a chemical supply apparatus, and a substrate treatment apparatus. The pump according to one embodiment of the present invention comprises: a tube which has elasticity and is formed with a flow path for allowing chemicals to flow therein; and a case which is divided into at least...

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Bibliographische Detailangaben
Hauptverfasser:	JUNG SUNG CHUL, CHOI BYOUNG DOO, SON YOUNG JUN, LEE WOO RAM, JUNG WOO SIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEMICONDUCTOR DEVICES WEAPONS
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Beschreibung
Zusammenfassung:	Provided are a pump, a chemical supply apparatus, and a substrate treatment apparatus. The pump according to one embodiment of the present invention comprises: a tube which has elasticity and is formed with a flow path for allowing chemicals to flow therein; and a case which is divided into at least two chambers having an inner space for allowing gas to be supplied or discharged and covering the outside circumstance of the tube. According to the composition of the pump of the present invention, it is possible to apply pressure to or release pressure from the corresponding outside circumferential surface of the tube, respectively, independently without interference in the mutual inside pressure of chambers by the operation of supplying air to or discharging air from each divided chamber in the case, thereby securing an efficient pumping operation of the pump and then implementing precise control for the discharge pressure of the chemicals. 본 발명은 펌프, 액 공급장치 및 기판처리장치를 제공한다. 본 발명의 일 실시예에 따른 펌프는 내부에 액이 유동하는 유로가 형성되며 탄성을 갖는 튜브; 및 내부공간이 기체가 공급되거나 배출되는 적어도 2 개의 챔버로 구획되며, 상기 적어도 2 개의 챔버가 상기 튜브의 외측둘레를 커버하는 케이스;를 포함한다. 본 발명의 상기 펌프의 구성에 따르면, 케이스 내의 구획된 각각의 챔버로 기체가 공급되거나 배출되는 동작에 의해 챔버 상호 간의 내부압력에 대한 간섭이 없이 독립적으로 튜브의 각각 대응되는 외측둘레면에 압력을 가하거나 해제함으로써 펌프의 효율적인 펌핑 동작을 확보할 수 있으며, 나아가 액의 토출압력에 대한 정밀한 제어를 구현할 수 있다.