Tube Pump Comprising the same and Chemical solution supplying device

The technical idea of the present invention provides a tube which comprises: an outer layer including a first material having flexibility; an inner layer including a second material having flexibility and chemical resistance; and an intermediate layer interposed between the outer layer and the inner layer and including an electrically conductive material. According to exemplary embodiments of the present invention, the change in current in the intermediate layer included in the tube and including an electrically conductive material is measured, the degree of deformation of the state of the tube is determined through the measured change, the amount of a chemical solution supplied from the tube to a wafer is maintained at a constant level, and the functional reliability of semiconductors manufactured by using the supplied chemical solution can be secured. 본 발명의 기술적 사상은 가요성을 가지는 제1 물질을 포함하는 외층; 가요성 및 내약품성을 가지는 제2 물질을 포함하는 내층; 및 상기 외층과 상기 내층 사이에 개재되며, 전기 전도성 물질을 포함하는 중간층; 을 포함하는 튜브를 제공한다.