Droplet inspecting unit and substrate treating apparatus including the same

Provided are a droplet inspection unit including a rotatable camera and a substrate processing device including the same. The substrate processing device includes: a processing unit which supports a substrate while the substrate is being processed; an inkjet head unit that discharges liquid droplets...

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Bibliographische Detailangaben
Hauptverfasser:	KANG HAN LIM, JIN WON YONG, LEE JAE DUCK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	Provided are a droplet inspection unit including a rotatable camera and a substrate processing device including the same. The substrate processing device includes: a processing unit which supports a substrate while the substrate is being processed; an inkjet head unit that discharges liquid droplets on the substrate; a gantry unit which moves the inkjet head unit; and a droplet inspection unit which inspects the droplet. The droplet inspection unit includes: a measurement module which measures droplets; a processing module which inspects the droplet by analyzing measurement results of the droplet; and a rotation module for rotating the measurement module, if the measurement module measures droplets. 회전 가능한 카메라를 포함하는 액적 검사 유닛 및 이를 포함하는 기판 처리 장치를 제공한다. 상기 기판 처리 장치는, 기판이 처리되는 동안 기판을 지지하는 공정 처리 유닛; 기판 상에 액적을 토출하는 잉크젯 헤드 유닛; 잉크젯 헤드 유닛을 이동시키는 갠트리 유닛; 및 액적을 검사하는 액적 검사 유닛을 포함하며, 액적 검사 유닛은, 액적을 측정하는 측정 모듈; 액적의 측정 결과를 분석하여 액적을 검사하는 처리 모듈; 및 측정 모듈이 액적을 측정하는 경우, 측정 모듈을 회전시키는 회전 모듈을 포함한다.