ELECTROSTATIC CHUCK

An objective is to provide an electrostatic chuck capable of suppressing the influence of a position deviation of a cooling flow path. An electrostatic chuck includes: a ceramic dielectric substrate; and a base plate supporting the ceramic dielectric substrate and including an upper surface on the c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IKEGUCHI MASAFUMI, UEFUJI JUMPEI, ONO AKIHITO, UMETSU TOMOKI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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