NOVEL SILOXANE POLYMER COMPOSITIONS AND THEIR USE

본 발명은 실록산 중합체 조성물에 관한 것이다. 특히, 본 발명은 리소그래피 제작 공정에서 사용하기에 적합한 특성을 갖는 실록산 중합체 조성물에 관한 것이다. 본 발명은 또한 이러한 조성물의 합성, 중합 및 가교에 관한 것이다. The present invention provides a method for covering a substrate, and includes the following operations: (a) admixing at least four different silane monomers and at least o...

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Bibliographische Detailangaben
Hauptverfasser:	HADZIC ADMIR, LEIVO JARKKO, GORDON GRAEME, JAERVITALO HENNA, KAERKKAEINEN ARI, HANNU KUURE MILJA, PESONEN MATTI, KUVAJA RAUNA LEENA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ADHESIVES APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL PAINT OR INK REMOVERS CHEMISTRY CINEMATOGRAPHY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COMPOSITIONS BASED THEREON CORRECTING FLUIDS DYES ELECTROGRAPHY FILLING PASTES HOLOGRAPHY INKS MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS POLISHES THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	본 발명은 실록산 중합체 조성물에 관한 것이다. 특히, 본 발명은 리소그래피 제작 공정에서 사용하기에 적합한 특성을 갖는 실록산 중합체 조성물에 관한 것이다. 본 발명은 또한 이러한 조성물의 합성, 중합 및 가교에 관한 것이다. The present invention provides a method for covering a substrate, and includes the following operations: (a) admixing at least four different silane monomers and at least one bi-silane to a first solvent(s) to form a mixture, with the proviso that at least one of the silane monomers or the bi-silane comprises an active group capable of achieving cross-linking to adjacent siloxane polymer chains of the siloxane polymer composition; (b) subjecting the mixture to an acid treatment so that the silane monomers are at least partially hydrolysed, and the hydrolysed silane monomers, the silane monomers and the bi-silane are at least partially polymerized and cross-linked; (c) optionally changing the first solvent to a second solvent; and (d) subjecting the mixture to further cross-linking of the siloxane polymer to achieve a predetermined degree of cross-linking, depositing the siloxane polymer composition on the substrate, and optionally curing the deposited siloxane polymer composition.