IMAGE SENSOR
An image sensor is provided. The image sensor comprises: a substrate in which a first photoelectric conversion element is disposed, wherein the substrate has a first surface and a second surface opposite the first surface; pixel separation patterns extending from the first surface of the substrate i...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | An image sensor is provided. The image sensor comprises: a substrate in which a first photoelectric conversion element is disposed, wherein the substrate has a first surface and a second surface opposite the first surface; pixel separation patterns extending from the first surface of the substrate into the substrate, surrounding the first photoelectric conversion element, and defining a first pixel region in the substrate; a first vertical gate structure which extends in the first pixel region from the first surface of the substrate into the substrate and comprises a first portion disposed in the substrate and a second portion disposed on the first surface of the substrate; a second vertical gate structure which extends in the first pixel region from the first surface of the substrate into the substrate, wherein the second vertical gate structure includes a first portion disposed in the substrate and a second portion disposed on the first surface of the substrate; and a floating diffusion region which is disposed at an edge of the first pixel region in the substrate, is disposed between the first portion of the first vertical gate structure and the first portion of the second vertical gate structure, and has an upper surface formed on the same plane as the first surface of the substrate. A width of the first portion of the first vertical gate structure in a horizontal direction gradually decreases in a horizontal direction approaching the floating diffusion region, the first portion of the first vertical gate structure comprises a first sidewall facing the first portion of the second vertical gate structure, the first portion of the second vertical gate structure comprises a second sidewall facing the first portion of the first vertical gate structure, and spacing between the first sidewall and the second sidewall decreases in a horizontal direction approaching the floating diffusion region. According to the present invention, the image sensor with improved transmission characteristics of the vertical gate structure is provided.
이미지 센서가 제공된다. 이미지 센서는 내부에 제1 광전 변환 소자가 배치되고, 제1 면 및 제1 면과 대향하는 제2 면이 정의되는 기판, 기판의 제1 면으로부터 기판의 내부로 연장되고, 제1 광전 변환 소자를 둘러싸고, 기판에 제1 픽셀 영역을 정의하는 픽셀 분리 패턴, 제1 픽셀 영역에서 기판의 제1 면으로부터 기판의 내부로 연장되고, 기판의 내부에 배치되는 제1 부분 및 기판의 제1 면 상에 배치된 제2 부분을 포함하는 제1 수직 게이트 구조체, 제1 픽셀 영역에서 기판의 제1 면으로부터 기판의 내부로 연장되고, 제1 수직 게이트 구조체와 직접 인접하게 배치되고, 기판의 내부에 배치되는 제1 부분 및 기판의 제1 면 상에 배치된 제2 부분을 포함하는 제2 수직 게이트 구조체, 및 기판의 내부에서 제1 픽셀 영역의 가장자리에 배치되고, 제1 수직 게이트 구조체의 제 |
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