SUBSTRATE CONVEYANCE METHOD SUBSTRATE PROCESSING DEVICE AND RECORDING MEDIUM
A substrate transport method that can prevent corrosion caused by light from occurring on the surface of a substrate is provided. The substrate transport method includes: loading the substrate into a receiving unit; detecting that light emitted from an optical sensor (302) is blocked by the substrat...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | A substrate transport method that can prevent corrosion caused by light from occurring on the surface of a substrate is provided. The substrate transport method includes: loading the substrate into a receiving unit; detecting that light emitted from an optical sensor (302) is blocked by the substrate transported to the receiving unit to confirm that the substrate is present in the receiving unit; and stopping the irradiation of light from the optical sensor (302) before the substrate is unloaded from the receiving unit.
[과제] 광에 의한 부식이 기판의 표면에 발생하는 것을 방지할 수 있는 기판 반송 방법이 제공된다. [해결 수단] 기판 반송 방법은, 기판을 수용 유닛에 반입하고, 수용 유닛에 반송된 기판에 의해 광 센서(302)로부터 조사된 광이 차단된 것을 검출하여 기판이 수용 유닛에 존재하는 것을 확인하고, 기판을 수용 유닛으로부터 반출하기 전에 광 센서(302)로부터의 광의 조사를 정지한다. |
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