FLUID CONTROL DEVICE FLUID CONTROL METHOD AND FLUID CONTROL PROGRAM

The present invention improves flow rate measurement accuracy in a state in which a valve is fully closed. A fluid control device comprises: a fluid resistance element (33) provided on a flow path (2R); an upstream pressure sensor (31a) configured to detect an upstream pressure P1 of the fluid resis...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUMOTO SOTA, NAGAI KENTARO, MIYATA YOSHIKI, MATSUURA KAZUHIRO, HISAMORI YOSUKE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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