HEAT TREATMENT APPARATUS PROCESSING TARGET PROTECTING METHOD AND PROGRAM

The present invention aims to provide a technology to suppress the damage by heating to a subject staying in a treatment container. A heat treatment apparatus includes a control apparatus, and performs the heat treatment by heating a subject stored in a treatment container by a heating unit. The con...

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Bibliographische Detailangaben
Hauptverfasser:	KUMAGAI JIN, INAGAKI MORIHITO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention aims to provide a technology to suppress the damage by heating to a subject staying in a treatment container. A heat treatment apparatus includes a control apparatus, and performs the heat treatment by heating a subject stored in a treatment container by a heating unit. The control apparatus comprises: a temperature control unit configured to control the heating by the heating unit in accordance with a preset temperature of the heating unit; a monitoring unit configured to monitor the treatment container storing the subject based on the monitoring conditions of the function for protecting the subject; and a protection unit configured to, when an upper limit time for monitoring has passed with the monitoring conditions satisfied, change the preset temperature of the heating unit into a preset temperature for the protective function. 본 발명은 처리 용기에 정류(停留)한 피처리체의 가열에 의한 손상을 억제하는 기술을 제공하는 것을 목적으로 한다. 제어 장치를 갖고, 처리 용기에 수납된 피처리체를 가열부에 의해 가열하여 열처리하는 열처리 장치로서, 제어 장치는, 가열부의 설정 온도에 따라 가열부에 의한 가열을 제어하도록 구성된 온도 제어부와, 피처리체가 수납되는 처리 용기를, 피처리체의 보호 기능의 감시 조건에 기초하여 감시하도록 구성된 감시부와, 감시 조건을 만족시킨 상태에서 감시 상한 시간이 경과한 경우, 가열부의 설정 온도를 보호 기능의 설정 온도로 변경하도록 구성된 보호부를 가짐으로써 상기 과제를 해결한다.