Probe card and method for semiconductor device test using the same

Provided is a probe card, which includes: a lower plate; an upper plate spaced apart from the lower plate; and a needle which extends vertically to penetrate the lower plate and the upper plate, wherein the needle includes a first member which extends vertically and includes a first material, and a...

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Bibliographische Detailangaben
Hauptverfasser: CHOI BYUNGWOOK, WI SEONG YEON
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:Provided is a probe card, which includes: a lower plate; an upper plate spaced apart from the lower plate; and a needle which extends vertically to penetrate the lower plate and the upper plate, wherein the needle includes a first member which extends vertically and includes a first material, and a second member horizontally connected to the first member, wherein the second member includes a second material different from the first material. Accordingly, the deformation and/or movement of the needle can be controlled. 하부 플레이트; 상기 하부 플레이트로부터 위로 이격되는 상부 플레이트; 및 상하로 연장되어 상기 하부 플레이트 및 상기 상부 플레이트를 관통하는 니들; 을 포함하고, 상기 니들은: 상하로 연장되며 제1 물질을 포함하는 제1 부재; 및 상기 제1 부재의 옆에 결합되는 제2 부재; 를 포함하되, 상기 제2 부재는 상기 제1 물질과는 상이한 제2 물질을 포함하는 프로브 카드가 제공된다.