Semiconductor Device Test Chamber

According to the present invention, a semiconductor device test chamber (100) comprises: a housing (110) of which a portion of the front is open, and which forms the exterior; a blower fan (120) which is disposed inside one side of a lower portion of the housing (110); a circulation duct (130) which...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HA DO KI, YEOM DONG HYUN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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