standby port and substrate processing apparatus having the same

The present invention relates to an atmospheric port and a substrate processing device having the same. By inhaling and removing the fume generated, when the processing liquid is discharged to the atmospheric port before supplying the processing liquid to the substrate, the atmospheric port prevents...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANG YOUNG JIN, KIM JONG HAN, CHOI YOUNG JUN, WOO JONG HYEON, KIM DAE HUN, JUNG BU YOUNG, YU JIN TACK, PARK GUI SU, SHIN CHEOL YONG, BANG BYUNG SUN, KIM HEE HWAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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