VACUUM TUBE PLASMA PROCESSING DEVICE WITH MAGNETIC CORE
A plasma generating device using a variable magnetic core according to an embodiment is equipped with a plurality of magnetic cores of a plasma chamber and is coupled with a physical driving device. Thus, provided is a device that simultaneously satisfies an ignition performance and a high power tra...
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | A plasma generating device using a variable magnetic core according to an embodiment is equipped with a plurality of magnetic cores of a plasma chamber and is coupled with a physical driving device. Thus, provided is a device that simultaneously satisfies an ignition performance and a high power transmission performance when a magnetic core adequate inductance of a plasma ignition area and a magnetic core adequate inductance for maintaining plasma when transmitting high power are different. Therefore, the present invention is capable of implementing a pipe plasma processing device with high processing efficiency and no ignition failure rate.
실시예에 따른 가변형 자기코어를 이용한 플라즈마 생성 장치는 플라즈마 챔버의 자기코어를 다중으로 구비하고 물리적인 구동장치를 결합하여 플라즈마 점화영역의 자기코어 적정 인덕턴스와 고전력 전달 시 플라즈마 유지를 위한 자기코어 적정 인덕턴스가 상이한 경우에 점화성능과 고전력 전달 성능을 동시에 만족하는 장치를 제공한다. |
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