SUBSTRATE RECEIVING APPARATUS

An embodiment of the present invention provides a substrate accommodating device that enables smooth transfer of a substrate between a plurality of substrate transfer robots. In the present invention, the substrate accommodating device comprises: openings formed to allow entry of a plurality of subs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PARK KUN HEE, JEONG CHEOL HWAN, YUN SEONG HYUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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