IMAGING ASSEMBLY AND SPECTRAL IMAGING ELLIPSOMETER INCLUDING THE SAME

The purpose of the present invention is to provide an imaging assembly of a spectral imaging ellipsometer, which can provide improved transmittance and prevent color aberration. An imaging assembly of a spectral imaging ellipsometer comprises: an analyzer for polarizing reflected light reflected fro...

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Bibliographische Detailangaben
Hauptverfasser:	OH JUN TAEK, HWANG EUN SOO, AHN JIN WOO, PARK YOUNG KYU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	The purpose of the present invention is to provide an imaging assembly of a spectral imaging ellipsometer, which can provide improved transmittance and prevent color aberration. An imaging assembly of a spectral imaging ellipsometer comprises: an analyzer for polarizing reflected light reflected from a sample surface; an imaging mirror optical system disposed on the optical path of the reflected light passing through the analyzer and comprising a first mirror having a concave surface and a second mirror having a convex surface; and a light detector for receiving the light passing through the imaging mirror optical system and collecting spectral data. The reflected light is primarily reflected by the first mirror, the primarily reflected light is secondarily reflected by the second mirror, proceeds to the first mirror, and is thirdly reflected by the second mirror so that an image is formed on a light-receiving surface of the light detector. 분광 영상 타원편광기의 이미징 어셈블리, 샘플 표면으로부터 반사된 반사광을 편광시키기 위한 분석기, 상기 분석기를 통과한 상기 반사광의 광로 상에 배치되며 오목면을 갖는 제1 미러 및 볼록면을 갖는 제2 미러를 포함하는 이미징 미러 광학계, 및 상기 이미징 미러 광학계를 통과한 광을 수광하여 스펙트럼 데이터를 수집하기 위한 광 검출기를 포함한다. 상기 반사광은 상기 제1 미러에 의해 1차 반사되고, 상기 1차 반사된 광은 상기 제2 미러에 의해 2차 반사되어 상기 제1 미러로 진행하고 상기 제2 미러에 의해 3차 반사되어 상기 광 검출기의 수광면에 결상된다.