EVAPORATION SYSTEM

The purpose of the present invention is to provide a substrate transport system that transports a substrate and mask separately without bonding the substrate and mask in the transport of a large-area substrate deposition system. In accordance with the above purpose, the present invention provides a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHOI SANG GYU, JEON OK CHUL, KIM MIN BAE, JEONG, KWANG HO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The purpose of the present invention is to provide a substrate transport system that transports a substrate and mask separately without bonding the substrate and mask in the transport of a large-area substrate deposition system. In accordance with the above purpose, the present invention provides a transport system in which a substrate transport mechanism transports only the substrate, and the mask is transported separately from the substrate mask provided in a deposition chamber. 본 발명의 목적은 대면적 기판 증착 시스템의 반송에 있어서, 기판과 마스크를 합착하지 않은 상태로 별도 반송하는 기판 반송 시스템을 제공하고자 하는 것이다. 상기 목적에 따라 본 발명은 기판반송기구가 기판만 반송하고, 마스크는 증착챔버에 비치되어 있는 기판 마스크 별도 반송방식의 반송시스템을 제공한다.