MANUFACTURING METHOD OF DEFECT-FREE FERROELECTRIC THIN FILM USING LATTICE STRAIN CONTROL

A method for manufacturing a zero-defect ferroelectric thin film using lattice strain control, includes the following steps of: locating a barium titanate (BTO) target in a vacuum chamber; depositing a barium titanate thin film on a magnesium oxide substrate via a vacuum evaporation method, in an ox...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM JONGBUM, JEON YOUNG UK, KIM BOGYU, KANG JOONHYUN, KIM GEUNPIL, LEE KWAN IL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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