하우징을 통해 연장되는 유체-충전식 배기 튜브들을 갖는 결정 인상 시스템들

유체-냉각식 배기 튜브를 갖는 결정 인상 시스템들이 개시된다. 유체-냉각식 배기 튜브는 반응기 하우징을 통해 반응 챔버 내로 연장된다. 일부 실시예들에서, 배기 튜브는 결정 인상기 하우징의 최하부를 통해 그리고 잉곳 인상기 하우징 내의 최하부 열 차폐부를 통해 연장된다. Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into...

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Hauptverfasser: DIODA MAURO, SREEDHARAMURTHY HARIPRASAD, HARINGER STEPHAN, ZARDONI MARCO
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creator DIODA MAURO
SREEDHARAMURTHY HARIPRASAD
HARINGER STEPHAN
ZARDONI MARCO
description 유체-냉각식 배기 튜브를 갖는 결정 인상 시스템들이 개시된다. 유체-냉각식 배기 튜브는 반응기 하우징을 통해 반응 챔버 내로 연장된다. 일부 실시예들에서, 배기 튜브는 결정 인상기 하우징의 최하부를 통해 그리고 잉곳 인상기 하우징 내의 최하부 열 차폐부를 통해 연장된다. Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. In some embodiments, the exhaust tube extends through the bottom of the crystal puller housing and through a bottom heat shield within the ingot puller housing.
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Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. 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Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. 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Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. In some embodiments, the exhaust tube extends through the bottom of the crystal puller housing and through a bottom heat shield within the ingot puller housing.</abstract><oa>free_for_read</oa></addata></record>
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subjects AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
CHEMISTRY
CRYSTAL GROWTH
METALLURGY
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
title 하우징을 통해 연장되는 유체-충전식 배기 튜브들을 갖는 결정 인상 시스템들
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