SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

A substrate processing device is equipped with: a chamber; a decompression equipment that decompresses an internal space of the chamber; a substrate holding support part that hold-supports a substrate having a film in the internal space; a cover installed with a plurality of openings and covering th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KISHIMOTO KATSUSHI, NISHIKAWARA TOMOFUMI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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