JIG AND POLISHING APPARATUS INCLUDING THE SAME

The present invention relates to a jig and a polishing apparatus including the same. The jig comprises: a seating unit having an accommodation space in which a target object to be polished is seated; a first guide unit formed to surround the outer surface of the seating unit; and a second guide unit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JEON JAE SEUNG, NOH JIN HYEONG, SHIM BYOUNG YUL
Format: Patent
Sprache:eng ; kor
Schlagworte:
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