NOZZLE SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

The present invention is to efficiently mix a fluid and a processing liquid in liquid processing using a mixed fluid of the fluid and the processing liquid. A nozzle mixes and discharges a fluid containing pressurized pure water vapor or mist and a processing liquid containing at least sulfuric acid...

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Bibliographische Detailangaben
Hauptverfasser:	HSU YENRUI, SAKURAI HIROKI, MORI KANTA, MIZUGUCHI SHOKI, OGATA NOBUHIRO, HASHIMOTO YUSUKE, GOTO DAISUKE, YADA KENJI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR NOZZLES ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention is to efficiently mix a fluid and a processing liquid in liquid processing using a mixed fluid of the fluid and the processing liquid. A nozzle mixes and discharges a fluid containing pressurized pure water vapor or mist and a processing liquid containing at least sulfuric acid. The nozzle includes a first discharge port, a second discharge port, and a lead-out path. The first discharge port ejects the fluid. The second discharge port ejects the processing liquid. The lead-out path communicates with the first discharge port and the second discharge port and leads out the mixed fluid of the fluid ejected from the first discharge port and the processing liquid ejected from the second discharge port. In addition, the first discharge port or the second discharge port is arranged at a position deviated from the central axis of the lead-out path in the plan view. 본 발명은, 유체와 처리액의 혼합 유체를 사용하는 액 처리에 있어서 유체와 처리액을 효율적으로 혼합하는 것이다. 노즐은, 가압된 순수의 증기 또는 미스트를 포함하는 유체와 적어도 황산을 포함하는 처리액을 혼합해서 토출하는 노즐이다. 노즐은, 제1 토출구와, 제2 토출구와, 도출로를 구비한다. 제1 토출구는, 유체를 토출한다. 제2 토출구는, 처리액을 토출한다. 도출로는, 제1 토출구 및 제2 토출구에 연통하여, 제1 토출구로부터 토출된 유체와 제2 토출구로부터 토출된 처리액의 혼합 유체를 도출한다. 또한, 제1 토출구 또는 제2 토출구는, 평면으로 보아 도출로의 중심축으로부터 어긋난 위치를 향해서 배치된다.