SUBSTRATE PROCESSING APPARATUS INCLUDING PROCESSING LIQUID SUPPLY UNIT AND PROCESSING LIQUID SUPPLY METHOD

According to the present invention, a processing liquid supply unit, a substrate processing apparatus including the same, and a processing liquid supply method may be provided. The processing liquid supply unit includes: a storage part for storing a processing liquid for a substrate processing proce...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOUN JUN HEE, CHOI YOUNG SEOP
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEMICONDUCTOR DEVICES SEPARATION TESTING TRANSPORTING
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