HEAT TREATMENT APPARATUS CONTROL METHOD AND PROGRAM
Provided is a technology for correcting the temperature of heat treatment depending on the number of times of cleaning treatment on deposits deposited on a treatment container. The present invention relates to a heat treatment apparatus having a control device and performing heat treatment on an obj...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | Provided is a technology for correcting the temperature of heat treatment depending on the number of times of cleaning treatment on deposits deposited on a treatment container. The present invention relates to a heat treatment apparatus having a control device and performing heat treatment on an object to be treated housed in the treatment container. The control device includes: a heat treatment control unit configured to control heat treatment depending on treatment conditions; a cleaning control unit configured to control cleaning treatment on deposits adhering to the treatment container due to the heat treatment; a cumulative film thickness specification unit configured to specify the value of the cumulative film thickness of the deposits adhering to the treatment container, based on the treatment conditions for the heat treatment; and a temperature correction unit configured to correct the temperature of the heat treatment based on a temperature correction amount depending on the value of the cumulative film thickness and the number of times of the cleaning treatment.
[과제] 처리 용기에 부착된 부착물의 클리닝 처리의 횟수에 따라 열처리의 온도를 보정하는 기술을 제공한다. [해결수단] 제어 장치를 갖고, 처리 용기에 수납된 피처리체를 열처리하는 열처리 장치로서, 제어 장치는, 처리 조건에 따라 열처리를 제어하도록 구성된 열처리 제어부와, 열처리에 의해 처리 용기에 부착된 부착물의 클리닝 처리를 제어하도록 구성된 클리닝 제어부와, 처리 용기에 부착되어 있는 부착물의 누적 막두께의 값을, 열처리한 처리 조건에 기초하여 특정하도록 구성된 누적 막두께 특정부와, 누적 막두께의 값 및 클리닝 처리의 횟수에 따른 온도 보정량에 기초하여 열처리의 온도를 보정하도록 구성된 온도 보정부를 가짐으로써 상기 과제를 해결한다. |
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