ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME

Provided are an electronic device comprising a semiconductor memory and a manufacturing method thereof. In the electronic device comprising a semiconductor memory according to one embodiment of the present invention, the semiconductor memory may comprise: a memory cell disposed on a substrate and co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DONG CHA DEOK, CHOI KEO ROCK, KIM GUK CHEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRICITY PHYSICS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Provided are an electronic device comprising a semiconductor memory and a manufacturing method thereof. In the electronic device comprising a semiconductor memory according to one embodiment of the present invention, the semiconductor memory may comprise: a memory cell disposed on a substrate and comprising a variable resistance layer and a selection element layer; a protective layer disposed on a side surface of the memory cell and an upper surface of the substrate; and a first encapsulation layer disposed so as to surround the memory cell and the protective layer, wherein the protective layer may have a surface morphology modified by helium processing. Therefore, the present invention is capable of increasing reliability. 반도체 메모리를 포함하는 전자 장치 및 그 제조 방법이 제공된다. 본 발명의 일 실시예에 따른 반도체 메모리를 포함하는 전자 장치에 있어서, 상기 반도체 메모리는 기판 상에 배치되며, 가변 저항층 및 선택 소자층을 포함하는 메모리 셀; 상기 메모리 셀의 측면 및 상기 기판의 상면에 배치된 보호층; 및 상기 메모리 셀 및 상기 보호층을 둘러싸도록 배치되는 제1 캡슐화층을 포함할 수 있으며, 상기 보호층은 헬륨 처리에 의해 개질된 표면 몰폴로지를 가질 수 있다.