Hybrid Isolation System

The present invention relates to a system for performing measurement and work on an object on an optical table with high precision. A hybrid isolation system according to the present invention includes an extra damper capable of compensating for deformation of the optical table due to the object, an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOUK YOUNGCHUN, HEO HAENGPAL, RYU DONGOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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