SEMICONDUCTOR HEATER ELEMENT AND MANUFACTURING METHOD THEREOF

The present invention relates to a semiconductor heater element and a manufacturing method therefor. Specifically, the present invention relates to the semiconductor heater element that prevents a crack from occurring by adjusting a component of each layer configured with the semiconductor heater el...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RYU SI HONG, KWON JIN GU, JEON YONG MIN, LEE SEONG EUI
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:The present invention relates to a semiconductor heater element and a manufacturing method therefor. Specifically, the present invention relates to the semiconductor heater element that prevents a crack from occurring by adjusting a component of each layer configured with the semiconductor heater element, and can prevent deformation and damage of the semiconductor heater element; and a manufacturing method therefor. The semiconductor heater element comprises: a ceramic substrate layer; a heating electrode layer; and a protective layer. 본 발명은 반도체 히터 소자 및 그의 제조방법에 관한 것으로, 구체적으로 반도체 히터 소자를 구성하는 각각의 층의 성분을 조절하여 크랙 발생을 억제하고 반도체 히터 소자의 변형 및 파손을 방지할 수 있는 반도체 히터 소자 및 그의 제조방법에 관한 것이다.