LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD USING THE SAME

A laser annealing apparatus may comprise: a plurality of lasers; a laser controller which controls the lasers such that a plurality of laser beams generated at the lasers may be projected at timings different from each other; a beam mixer optical system which mixes the laser beams of which the proje...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE HAESOOK, SANGU AKIFUMI, RYU JEKIL, JEUN JIN HONG, PARK CHEOLHO, WOO JEONGHUN, CHAE YOUNGSU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!