Replacing consumables apparatus substrate processing system and method for replacing consumables
The present invention is a substrate processing device capable of replacing consumables. Disclosed is a method of supporting the replacement of consumables such as a shower head and focus ring while maintaining the chamber process environment of the substrate processing device. According to the pres...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | eng ; kor |
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| Zusammenfassung: | The present invention is a substrate processing device capable of replacing consumables. Disclosed is a method of supporting the replacement of consumables such as a shower head and focus ring while maintaining the chamber process environment of the substrate processing device. According to the present invention, the substrate processing device includes: a process chamber; a lifting member; a door means; and a transportation means.
본 발명은 소모품 교체가 가능한 기판 처리 장치로서, 기판 처리 장치의 챔버 공정 환경을 유지하면서 샤워 헤드, 포커스링 등의 소모품을 교체 가능하도록 지원하는 방안을 개시한다. |
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