CHAMBER APPARATUS FOR BUFFERING WAFER

The present invention relates to a chamber apparatus for a wafer buffer which buffers a wafer. The chamber apparatus for a wafer buffer comprises: a buffer chamber part stacking a plurality of wafers to buffer the wafers; a wafer heating part inserted between the stacking spaces of the wafers to per...

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Bibliographische Detailangaben

Hauptverfasser:	HEO JIN WOO, LEE HO MIN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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